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  5. Thickness Determination of Nanoscale SiO2/Si Thin Film Thickness Reference Materials by Grazing Inci

Thickness Determination of Nanoscale SiO2/Si Thin Film Thickness Reference Materials by Grazing Inci

来源 :International Conference on Nanoscience & Technology,China 2 | 被引量 : 0次 | 上传用户：shulili1987
【摘 要】
：
The grazing incidence X-ray reflectivity (GIXRR) is a kind of non-destructive inspection technology and absolute measurement method, which is used in the thin-film measurement broadly.In this study, t
【作 者】
：
Huifang Gao Lingling Ren 
【机 构】
：
National Institute of Metrology,China,Beijing 100013,China
【出 处】
：
International Conference on Nanoscience & Technology,China 2
【发表日期】
：
2013年3期
【关键词】
：
Grazing incidence X-ray reflectivity film thickness SiO2 reference materials Ell 
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　　The grazing incidence X-ray reflectivity (GIXRR) is a kind of non-destructive inspection technology and absolute measurement method, which is used in the thin-film measurement broadly.In this study, the SiO2 layers with nominal thicknesses of 10nm, 20nm and 50nm were measured by GIXRR technology, which can be obtained by fitting the whole spectral reflectance curves based on the Parratt recurrence formula.
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