【摘 要】
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The direct observation of dopant configurations in semiconductor nanowires is possible using a STEM with in situ heating holder set up.Annular dark-field(AD
【机 构】
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School of Electronics and Information,Anhui University
【出 处】
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The 6th International Conference on Nanoscience and Technolo
论文部分内容阅读
The direct observation of dopant configurations in semiconductor nanowires is possible using a STEM with in situ heating holder set up.Annular dark-field(ADF)images,obtained from STEM mode,provide easily interpretable results,in which vacuum appears dark,and the heavier the atom,the higher the scattering intensity,which generates atomic number(Z)contrast in the ADF image.
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