论文部分内容阅读
Electrical and Optical Properties of AP-PECVD of SiO2-Like Films from HMCTSO
【机 构】
:
Department of Welding and Production Engineering,Hanbat National University,San 16-1,Dukmyung-dong,Y
【出 处】
:
The 8th Asian-European International Conference on Plasma Su
【发表日期】
:
2011年1期
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