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针对多轴、高速和超精密激光干涉测量系统对光电接收器在探测灵敏度、响应带宽和稳定性等方面的特殊需求,提出一种基于远程探测的高带宽激光外差信号探测方法。首先,针对多轴激光干涉测量中多个传统光电接收器热耗散大、严重影响测量精度的问题,设计远程光纤探头,将光接收与光电信号处理部分完全分开,彻底消除光电接收器热耗散对测量系统的影响;其次,针对单光轴光功率微弱、难以探测和稳定性差的问题,设计具有主动温度漂移特点的APD高压反向偏置电源,在提高光电接收器探测灵敏度的同时增强其温度稳定性;设计的光电探测器能够实现远程光耦合传输,耦合效率能达到38%以上,最大探测灵敏度为0.52μW,测量带宽可达17.5MHz,满足多轴、高速超精密激光干涉测量系统对光电接收器的性能需求。
Aiming at the special requirements of photoelectric receiver in terms of detection sensitivity, response bandwidth and stability, a multi-axis, high speed and ultra-precision laser interferometry system is proposed to detect high-bandwidth laser heterodyne signal based on remote detection. First of all, aiming at the problem of large heat dissipation of many traditional optoelectronic receivers in multi-axis laser interferometry and seriously affecting the measurement accuracy, a long-distance optical fiber probe was designed to completely separate the light receiving and optoelectronic signal processing parts and eliminate the heat loss Secondly, aiming at the problem of weak single optical power, difficult to detect and poor stability, the APD high voltage reverse bias power supply with active temperature drift is designed to improve the detection sensitivity of the photoelectric receiver Its temperature stability; designed photodetector can achieve long-distance optical coupling transmission, the coupling efficiency can reach more than 38%, the maximum detection sensitivity is 0.52μW, the measurement bandwidth can reach 17.5MHz, to meet the multi-axis, high speed ultra-precision laser interferometry system Performance requirements for optoelectronic receivers.