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利用强度标定的发射光谱法 ,研究了感应耦合CF4 CH4 等离子体中空间基团的相对密度随宏观条件 (射频输入功率、气压和流量比 )的变化情况 .研究表明 :在所研究的碳氟 碳氢混合气体放电等离子体中除了具有丰富的CF ,CF2 ,CH ,H和F等活性基团外 ,还同时存在着C2 基团 ,其相对密度随着放电功率的提高而增加 ;随着气压的上升呈现倒“U”型的变化 .C2 随流量比R(R =[CH4 ] { [CH4 ]+[CF4 ]} )的变化不是单调的 ,其相对密度在R =7 5 %时存在一个极大值 ,并随着R进一步增加而减弱 ,然后趋于一个稳定值 .根据各基团相对密度的变化规律 ,认为等离子体中CF和CH基团的气相反应 (CF +CH→C2 +HF)是C2 基团产生的主要途径 ,并提出了形成C2 的基团碰撞的活化反应模型 ,据此进行的模拟计算的结果与实验相符 .
The change of the relative density of space groups in the inductively coupled CF4 CH4 plasma with the macroscopic conditions (RF input power, pressure and flow ratio) was investigated by intensity-calibration emission spectroscopy. The results show that in the studied CFB Hydrogen mixed gas discharge plasma in addition to rich in CF, CF2, CH, H and F and other active groups, but also exist C2 groups, the relative density increases with the discharge power; with the pressure The change of C2 with flow rate R (R = [CH4] {[CH4] + [CF4]}) is not monotonous, and its relative density has one pole at R = 75% Large value and weakened with the further increase of R, and then tends to a steady value.According to the variation law of the relative density of each group, it is considered that the gas phase reaction of CF and CH groups in the plasma (CF + CH → C2 + HF) Is the main way to generate C2 group. The activation reaction model of C2 group collision is proposed. The simulation results based on this result are consistent with the experiment.