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本文利用红外光谱技术研究了氮保护气氛下生长直拉微氮硅单晶中原生氧沉淀．研究发现，微氮硅单晶中除了有和１２２４ｃｍ－１红外吸收峰相对应的ａ。方石英原生氧沉淀外，还存在和１０２６，１０１４，９９６和８０１ｃｍ－１红外吸收峰相对应的氧氮复合体的原生氧沉淀．实验还研究了原生氧沉淀在微力硅单晶中的分布，以及和氧碳氢杂质的关系，进一步指出，上述除１２２４ｃｍ－１之外的红外吸收峰，并不是某一种氧现复合体的振动吸收，而是对应着几种不同形态的氧氨复合体。
In this paper, primary oxygen precipitation in Czochralski silicon nitride grown under a nitrogen atmosphere was studied by infrared spectroscopy. The study found that, in addition to micro-nitrogen single crystal and 1224cm-1 infrared absorption peak corresponding to a. In addition to the primary oxygen precipitation of cristobalite, there also existed primary oxygen precipitation of oxygen-nitrogen complex corresponding to the infrared absorption peaks of 1026, 1014, 996 and 801 cm-1. The experiment also studied the distribution of primary oxygen precipitates in the micro-silicon single crystal and the relationship with the oxygen and hydrocarbon impurities. It is further pointed out that the aforementioned infrared absorption peak other than 1224 cm -1 is not an oxygen complex Vibration absorption, but corresponding to several different forms of oxygen ammonia complex.