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本文研究了用射频溅射法制备的Fe73.5Cu1Nb3Si13.5B9薄膜的巨磁阻抗效应,并对其磁畴结构进行了分析.探讨在制备过程中加一纵向或横向稳恒磁场对薄膜各向异性场的影响.在制备过程中加磁场使得材料的软磁性能得到明显改善,矫顽力从400Am-1降为60Am-1,磁阻抗效应有较大提高.加横向磁场制备的Fe73.5Cu1Nb3Si13.5B9薄膜的畴结构,不是严格的沿着样品的长方向,而是略向宽方向倾斜.经300°C退火后的FeCuNbSiB薄膜具有最大的磁阻抗效应,其纵向磁阻抗比为38%,横向磁阻抗比为27%,巨磁阻抗效应的磁场灵敏度分别为47.5%/kAm-1和11.3%/kAm-1.
In this paper, the giant magneto-impedance effect of Fe73.5Cu1Nb3Si13.5B9 thin films prepared by radio frequency sputtering is studied and the magnetic domain structure is analyzed. In the process of preparation, a longitudinal or transverse magnetic field is applied to the film anisotropy Field.The influence of the magnetic field on the soft magnetic properties of the material was improved obviously during the preparation process.The coercive force decreased from 400Am-1 to 60Am-1, and the magneto-impedance effect was greatly improved.Fe73.5Cu1Nb3Si13 with transverse magnetic field was also prepared. The domain structure of the 5B9 thin film is not strictly along the length of the sample, but it is slightly inclined in the width direction. The FeCuNbSiB film annealed at 300 ° C has the maximum magneto-impedance effect with a longitudinal magnetic resistance ratio of 38% The magnetic impedance ratio is 27%, and the magnetic susceptibility of the giant magneto-impedance effect is 47.5% / kAm-1 and 11.3% / kAm-1, respectively.