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用注量为1.2×1016、3×1016、1.5×1017、3×1017、4.5×1017/cm2的Ta离子对Ti6Al4V合金进行表面改性,加速电压为146.5 keV。Ta离子注入后,用动电位极化曲线研究其抗Hank’s溶液腐蚀性能,用小角掠射X射线衍射研究其表面物相结构,用X射线光电子能谱分析其腐蚀样品的表面元素化合态。结果表明,Ta离子注入改善了Ti6Al4V合金抗Hank’s溶液腐蚀性能,但试样的腐蚀电流密度并非随Ta离子注量增加而单调减小,试样表面合金层、单质Ta和氧化物,共同形成腐蚀阻挡层,提高其抗腐蚀性能。
The Ti6Al4V alloy was surface modified with 1.2 × 10 16, 3 × 10 16, 1.5 × 10 17, 3 × 10 17 and 4.5 × 10 17 / cm 2 Ta at an accelerating voltage of 146.5 keV. After Ta ion implantation, the anti-Hank’s solution corrosion potential was studied by potentiodynamic polarization curve, the surface phase structure was studied by small angle glancing X-ray diffraction and the elemental chemical composition of the corrosion samples was analyzed by X-ray photoelectron spectroscopy. The results show that the Ta ion implantation improves the corrosion resistance of Ti6Al4V alloy against Hank’s solution. However, the corrosion current density of the Ti6Al4V alloy does not monotonically decrease with the increase of Ta ion fluence. The alloy layer, the elemental Ta and the oxide together form corrosion Barrier to improve its corrosion resistance.