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为获得具有较高复磁导率虚部的磁性材料并研究其微波物性,采用磁控溅射方法,制备Fe1-xBx磁性纳米膜,以Landau-L ifsh itz-G ibert方程研究复磁导率虚部随纳米膜各向异性场、饱和磁化强度和阻尼系数的变化规律,采用谐振腔法开展点频测试。结果表明,测试数据与理论计算值吻合较好。结合Fe1-xBx样品的制备,分析了其磁导率虚部随制备工艺、组分、厚度等的变化规律,这对于获得高磁导率(虚部)的磁性纳米膜具有指导意义。
In order to obtain the magnetic material with higher imaginary part of complex permeability and to study its microwave physical properties, Fe1-xBx magnetic nanofilm was prepared by magnetron sputtering and the complex permeability was studied by the Landau-L ifsh itz-G ibert equation The imaginary part changes with the anisotropy field, saturation magnetization and damping coefficient of the nanofilm. The results show that the test data agree well with the theoretical calculation. Combined with the preparation of Fe1-xBx samples, the changing law of the imaginary part of the magnetic permeability with the preparation process, composition, thickness and the like was analyzed, which is instructive for obtaining the magnetic nano-film with high permeability (imaginary part).