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采用溶胶-凝胶方法制备了ZrO2-TiO2(Ti含量为0—100mol%)高折射率光学薄膜.借助激光动态光散射技术研究溶胶微结构.采用傅里叶变换红外光谱、原子力显微镜、薄膜光学常数分析仪、漫反射吸收光谱及强激光辐照实验,对膜层的结构、光学性能及抗激光损伤性能进行了系统表征.结果显示,溶胶-凝胶工艺可以在部分牺牲折射率的情况下,使膜层的抗激光损伤性能得到大幅度提升.随Ti含量从0mol%增加至100mol%,膜层的平均损伤阈值呈下降趋势,当Ti含量从0mol%增加至60mol%时,平均损伤阈值从57.1J/cm2下降到21.1J/cm2(辐照激光波长为1053nm,脉冲宽度为10ns,“R/1”测试模式),当Ti含量从60mol%增加至100mol%时,平均损伤阈值变化很小.综合溶胶微结构、膜层光学性能和损伤实验结果可以推断,强激光诱导多光子吸收是引起膜层损伤的主要原因.不同配比的复合膜之间光学带隙的显著差异导致相同辐照激光情况下多光子吸收的概率发生变化,从而导致损伤阈值的规律性变化.
The high refractive index optical films of ZrO2-TiO2 (Ti content is 0-100mol%) were prepared by sol-gel method. The microstructure of sol was studied by laser light scattering. Fourier transform infrared spectroscopy, atomic force microscopy, The structure, optical properties and laser damage resistance of the films were systematically characterized by means of constant-dose analyzer, diffuse reflectance absorption spectroscopy and intense laser irradiation.The results show that the sol-gel process can be used in the partial sacrifice of refractive index , The anti-laser damage property of the film was greatly improved.With the increase of Ti content from 0mol% to 100mol%, the average damage threshold of the film showed a decreasing trend. When Ti content increased from 0mol% to 60mol%, the average damage threshold From 57.1 J / cm 2 to 21.1 J / cm 2 (irradiation laser wavelength is 1053 nm and pulse width is 10 ns, “R / 1” test mode). When Ti content is increased from 60 mol% to 100 mol%, the average damage threshold changes very much It is concluded that the strong laser-induced multiphoton absorption is the main reason for the damage caused by the composite sol micro-structure, the optical properties of the film and the damage experiment results.Significant differences in the optical bandgap between the composite films with different proportions The probability of multiphoton absorption changes under the same irradiation laser, resulting in a regular change of the damage threshold.