我校核能技术研究所物理气相沉积小组已研制成功空心阴极放电(HCD)反应离子镀设备。空心阴极放电离子镇是国外七十年代发展起来的新工艺新技术。这种技术在工业上应用十分广泛。由于镀膜与基体结合牢固,可以用作量具、刃具、模具、机械另件等表面硬化耐磨损保护镀膜和防腐蚀镀 Institute of Nuclear Energy Institute of Physical Vapor Deposition Group has developed hollow cathode discharge (HCD) reactive ion plating equipment. Hollow cathode discharge ion is the development of foreign seventies new technology new technology. This technology is widely used in industry. As the coating and the substrate with a solid, can be used for measuring tools, cutting tools, molds, mechanical parts and other hardfacing wear-resistant protective coating and anti-corrosion coating