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对不同基体上采用直流气体放电活化反应蒸发沉积法（ＤＣ－ＧＤＡＲＥ）制备的氧化锡超微粒薄膜的晶相结构进行了分析。结果表明：不同的基体对此类薄膜的生长有极重要的影响作用。
The crystal structure of the ultrafine tin oxide films prepared by DC-GDARE on different substrates was analyzed. The results show that different substrates have a very important effect on the growth of these films.