论文部分内容阅读
利用PCVD方法，对在AlN基板上合成金刚石薄膜进行实验研究，并就提高金刚石薄膜热导率及增强其与基底的粘附力等问题进行分析和讨论。
The PCVD method was used to study the synthesis of diamond films on AlN substrates. The problems of improving the thermal conductivity of diamond films and enhancing their adhesion to substrates were analyzed and discussed.