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1980年和1981年,中国计量科学研究院(NIM)与西德联邦技术物理研研院(PTB)的两个光学实验室交换测量了摄影阶梯密度片№75231(计量院标准)和№ 2、№3(PTB标准)。D.Hoeschen博士参加了比对测量工作。 计量院光学密度标准的几何条件和光谱条件符合ISO推荐的标准。PTB的条件符合德国标准 DIN 4512的规定,但此标准与ISO标准也是一致的。然而测量方法与我们不同,他们使用5米长的测光导轨,用等照度法求出光学密度值;又用四片已知透射比的中
In 1980 and 1981, two optical laboratories of China Institute of Metrology (NIM) and the German Federal Institute of Technical Physics (PTB) exchanged measurements of photolithographic steps № 75231 (Metrology Institute standard) and № 2, № 3 (PTB standard). D.Hoeschen participated in the comparison measurement work. The metrology institute optical density standard geometric conditions and spectral conditions in line with ISO recommended standards. The conditions of PTB comply with the German standard DIN 4512, but this standard is also consistent with the ISO standard. However, the measurement method is different from ours. They use a 5-meter-long photometric guide rail to obtain the optical density value by the iso-illuminance method. Using the four known transmittance ratios