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在伟大领袖毛主席“独立自主、自力更生”伟大方针的指引下,我国电子工业近年来有了迅速发展。雷达、卫星通迅等电子设备需要大量高性能的半导体器件。随着器件向高频、低噪声及大功率方向的发展,对制版的精度也相应地提出了更高的要求。线条要求越来越细,套刻的间距要求作的越来越小。 遵照伟大领袖毛主席关于“我们的方针要放在什么基点上?放在自己力量的基点上,叫做自力更生。”的教导,几年来,我们所不断地挖掘现有设备和工艺的潜力,并在清华大学等有关单位的大力支援下,采用了一些新技术制作了1微米细线条版,介决了窄间距套刻中的一些问题,初步满足了制管的需要。下面谈几点体会:
Guided by the great guideline Chairman Mao’s “independent and self-reliance” great leader, the electronic industry in our country has witnessed rapid development in recent years. Radar, satellite communications and other electronic devices require a large number of high-performance semiconductor devices. With the device to high-frequency, low noise and high-power direction, the accuracy of the plate also put forward higher requirements. Lines require more and more fine, set of carved spacing requirements made smaller and smaller. Follow the teachings of Chairman Mao, the great leader, on “What is our guiding principle? Put ourselves on the foundations of our own strength, called self-reliance.” In the past few years, we have continuously tapped the potential of existing equipment and processes, and at Tsinghua University and other relevant units, with the strong support of the use of a number of new technologies to produce a fine line version of 1 micron, narrow pitch set off some of the issues in the car, initially to meet the needs of pipe. Here are some experience: