紫外光学在光刻方面的巨大作用随着光刻变成信息时代的“铣床”，允许更短波长通过的光学技术现在似乎成了继续改善性能的最有希望的方法。这是一种戏剧性变化。近在一年前，光学在电子学制造方面的前景似乎还很暗淡。在最暗淡时刻，它失去了光刻研究开发主要支持者──美... The Great Role of UV Optics in Lithography As lithography becomes the “milling machine” in the information age, optical technologies that allow shorter wavelengths to pass through now seem to be the most promising way to continue to improve performance. This is a dramatic change. Nearly a year ago, the prospect of optics in electronics seemed bleak. In the darkest hour, it lost the main supporter of lithography research and development ─ ─ beauty ...