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介绍了一种基于半导体横向光电效应的角位置敏感探测器的结构设计,采用有限元方法对该角位置敏感探测器的输出特性:线性度、角度精度及响应灵敏度,进行了模拟计算,在较大的角度范围内(如90°)进行测量,得到了很高的线性精度(小于0.04%)和角度测量精度(约20″)。分析讨论了材料电学参量及模型结构参量等因素对其测角精度的影响,通过优化选取材料及结构参量,可以使线性度(小于0.01%)及精度(小于1″)更高,能够用于高精度的角度测量。
A structural design of angular position sensitive detector based on lateral photoelectric effect of semiconductors is introduced. The output characteristics of this angular position sensitive detector are linearity, angular accuracy and response sensitivity by finite element method. High linear accuracy (less than 0.04%) and angle measurement accuracy (about 20 “) are measured over a wide range of angles (eg, 90 °) .Analysis and discussion of the electrical parameters of the material and the structural parameters of the model Angle accuracy. By optimizing materials and structural parameters, linearity (less than 0.01%) and accuracy (less than 1 ”) can be made higher, which can be used for high-precision angle measurement.