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利用非对称双极脉冲磁控溅射技术,双极分别接纯铬靶和纯铝靶,通过调整两靶的功率,以反应溅射的方式沉积不同铬铝比的氮化铬铝涂层。研究不同Al含量的氮化铬铝涂层的结构和硬度。所获得的涂层依次为Cr0.95Al0.05N、Cr0.9Al0.1N、Cr0.83Al0.17N和Cr0.75Al0.25N,均为B1NaCl结构,(220)为主要的织构取向。随着涂层中Al含量的增加,涂层表面突起的尺寸逐渐降低,涂层趋于光滑致密;低Al含量涂层为柱状晶结构,随Al含量提高,涂层结构更加致密,并向等轴晶结构转变。涂层硬度随Al含量的提高先增加后降低,Cr0.83Al0.17N涂层表现出最高的硬度,维氏硬度达到33GPa以上。
By asymmetric bipolar pulsed magnetron sputtering technology, bipolar electrodes were respectively connected with pure chromium target and pure aluminum target. By adjusting the power of the two targets, reactive deposition of chromium and aluminum nitride coatings with different ratios of chromium to aluminum were carried out by reactive sputtering. The structure and hardness of chromium aluminum nitride coatings with different Al contents were studied. The obtained coatings were Cr0.95Al0.05N, Cr0.9Al0.1N, Cr0.83Al0.17N and Cr0.75Al0.25N, all of which were B1NaCl, and (220) was the main texture orientation. With the increase of Al content in the coating, the size of the protrusions on the surface of the coating gradually decreases, and the coating tends to be smooth and compact. The coating with low Al content has a columnar crystal structure. With the increase of Al content, the coating structure becomes more compact, Axial crystal structure change. The hardness of the coating first increases and then decreases with the increase of the Al content. The Cr0.83Al0.17N coating shows the highest hardness and the Vickers hardness reaches more than 33 GPa.