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应用多极场理论,研究了超大偏转角情况下的偏转像差,给出了应用十四极场做七级像差校正时的多极场表达式,计算了在多种情况下十四极场对七级像差校正的影响,同时还分析了多极场像差校正的方法。
The multi-polar field theory is used to study the deflection aberration under the condition of oversized deflection angle. The multi-polar field expression when using the fourteen-pole field to do the seven-level aberration correction is given. In each case, Field on the seven-level aberration correction, but also analyzed the multi-polar field aberration correction method.