论文部分内容阅读
半导体器件生产中常用的是离子交换树脂法生产纯水,且一般采用复合床和混合床串联的形式.整个树脂床工作一段时间后,其树脂交换能力下降,水质降低.当水的电导率小于5兆欧时,就需对树脂进行再生处理,而整个再生处理以往都要对阴、阳树脂浸泡三次碱、酸.能否用减少泡酸(碱)的次数,又不使再生处理后的水质下降的办法来节省药品开支呢?实践证明是可以的.为了达到上述目的,采取了如下做法:1.阳床的再生处理将阳树脂用干净水反洗1～2次,再将配好
Commonly used in the production of semiconductor devices is the production of pure water by ion exchange resin, and the general use of composite bed and mixed bed in series form.A whole resin bed after working for a period of time, the resin exchange capacity decreased, water quality decreased.When the conductivity of water is less than 5 megohms, the resin needs to be regenerated, and the entire regeneration process in the past have to Yin, Yang resin soak three times alkali, acid. Can reduce the number of acid (alkali), without the regeneration of the In order to achieve the above objectives, the following practices have been adopted: 1. Regeneration treatment of the sun bed The positive resin is backwashed with clean water for 1 to 2 times, and then it is dispensed well