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为满足航天器热试验常用真空计及标准漏孔的校准需要,研制了多功能真空校准装置。该装置可用于进行热偶真空计、压阻规、电容薄膜真空规、潘宁规、热阴极电离规等真空测量传感器的校准,同时也可以用于渗透型真空漏孔的校准。装置选用静态比对法、动态比对法、质谱比对法设计建成,真空校准范围为1.33×10~5Pa~1×10~(-4)Pa,真空漏孔校准范围为5×10~(-5)~5×10~(-9)Pa·m~3/s,装置智能化水平高,操作简便,适合真空规管的批量校准。
In order to meet the calibration requirements of common vacuum gauges and standard leaky holes in thermal tests of spacecraft, a multifunctional vacuum calibration device was developed. The device can be used for calibration of vacuum measuring sensors such as thermocouple gauge, piezoresistive gauge, capacitance film vacuum gauge, Penning gauge, hot cathode ionization gauge and the like, and can also be used for calibration of leaky vacuum leak holes. The device was designed by static comparison method, dynamic comparison method and mass spectrometry. The calibration range of vacuum calibration was 1.33 × 10 ~ 5Pa ~ 1 × 10 ~ (-4) Pa, and the calibration range of vacuum leak was 5 × 10 ~ ( -5) ~ 5 × 10 ~ (-9) Pa · m ~ 3 / s. The device is intelligent and easy to operate. It is suitable for batch calibration of vacuum gauge.