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研究用XRF基本参数法计算磁光盘的厚度和组成,铝层厚度用AIKα线计算,两层氨化硅厚度都采用StKα线计算确定,磁光记录层采用FeKα,CoKα和TbLα线来确定其厚度及组成。列出了膜厚方程,可由计算机很快解出,其结果与标准符合很好。
The thickness and composition of the magneto-optical disk were calculated by the XRF basic parameter method. The thickness of the aluminum layer was calculated by the AIKα line. The thickness of the two layers of silicon nitride was calculated by using StKα line. The thickness of the magneto-optical recording layer was determined by using the lines of FeKα, CoKα and TbLα. And composition. The film thickness equations are listed and can be solved very quickly by a computer and the results are in good agreement with the standard.