Al/Si_3N_4/TbFeCo/Si_3N_4磁光盘厚度定量计算方法

来源 :中国激光 | 被引量 : 0次 | 上传用户:lrg1169
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
研究用XRF基本参数法计算磁光盘的厚度和组成,铝层厚度用AIKα线计算,两层氨化硅厚度都采用StKα线计算确定,磁光记录层采用FeKα,CoKα和TbLα线来确定其厚度及组成。列出了膜厚方程,可由计算机很快解出,其结果与标准符合很好。 The thickness and composition of the magneto-optical disk were calculated by the XRF basic parameter method. The thickness of the aluminum layer was calculated by the AIKα line. The thickness of the two layers of silicon nitride was calculated by using StKα line. The thickness of the magneto-optical recording layer was determined by using the lines of FeKα, CoKα and TbLα. And composition. The film thickness equations are listed and can be solved very quickly by a computer and the results are in good agreement with the standard.
其他文献
鸡西矿业集团公司张辰煤矿西三采区3
期刊