高纯水——在电子工业中常定标为18兆欧——早已成为制作集成电路及类似的单片器件的主要材料之一。现在,几何尺寸变得更小的更高水平集成要求更严格控制工艺水中的微粒物质。为了最经济地生产这种高纯水,每一个特殊的应用需要一个适当的系统设计,该设计不但考虑到源水正常下的水质,而且还注意到它的暂时性的变化。 High purity water - often marked as 18 Megohm in the electronics industry - has long been one of the main materials used to make integrated circuits and similar monolithic devices. Now, the higher level of integration where geometry becomes smaller calls for more stringent control of particulate matter in process water. For the most economical production of this high purity water, each particular application requires an appropriate system design that takes into account not only the water quality under the normal source water but also its temporary changes.