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为适应微纳卫星平台的应用需求、实现磁强计的微型化,针对巨磁阻抗(GMI)效应微磁强计的研制需求设计并研制了弱磁信号处理芯片。在分析GMI微磁强计构造的基础上,针对单机(微)小型化提出了弱磁信号处理电路芯片化的方案;结合空间应用特点,设计并实现了基于SOI CMOS工艺的弱磁信号处理芯片。实测结果表明:基于所研制的弱磁信号处理芯片不仅实现了磁强计的微型化、集成化,而且具有良好的弱磁测量性能。
In order to meet the application requirements of the micro / nano satellite platform and realize the miniaturization of the magnetometer, a weak magnetic signal processing chip is designed and developed for the development of the micromagnetic magnetometer with GMI effect. Based on the analysis of the structure of GMI micro-magnetometer, a weak magnetic signal processing circuit chip is proposed for single (mini) miniaturization. According to the characteristics of space application, a weak magnetic signal processing chip based on SOI CMOS process is designed and implemented . The measured results show that the weak magnetic signal processing chip not only achieves miniaturization and integration of the magnetometer, but also has good performance of weak magnetic measurement.