采用简单的电化学沉积方法,通过调节电解液浓度和pH值,在硅衬底上实现了ZnO纳米结构的形貌控制。通过X射线衍射、扫描电镜和光致发光谱等表征手段对不同形貌的ZnO纳米结构进行了研究。研究发现,通过调节沉积条件,可以获得纳米棒、纳米簇丛和纳米片等不同形貌的ZnO纳米结构。其中,溶液pH值是纳米ZnO从一维结构到二维结构转变的关键因素。当pH值为12时,所获得的纳米ZnO为二维片状结构。光致发光谱显示二维ZnO纳米片的紫外本征峰相对于一维ZnO纳米棒发生了明显的蓝移,并且可见区的发光峰大大降低。这一结构将在光电器件、传感器等领域有很好的应用前景。 A simple electrochemical deposition method was used to control the morphology of ZnO nanostructures on silicon substrate by adjusting the electrolyte concentration and pH value. The ZnO nanostructures with different morphologies were characterized by X-ray diffraction, scanning electron microscopy and photoluminescence spectroscopy. It is found that ZnO nanostructures with different morphologies, such as nanorods, nanoclusters and nanosheets, can be obtained by adjusting deposition conditions. Among them, the pH value of the solution is a key factor for the transformation of the nano-ZnO from one-dimensional structure to two-dimensional structure. When the pH value is 12, the resulting nano-ZnO is a two-dimensional sheet structure. The photoluminescence spectrum shows that the UV intrinsic peak of two-dimensional ZnO nanosheets has a significant blue shift relative to one-dimensional ZnO nanorods, and the luminescence peak of the visible region is greatly reduced. This structure will have good application prospects in optoelectronic devices, sensors and other fields.