一、前言随着我国工业的发展,对半导体元件的需要量也日益增长。为了继续提高产品质量,提高原料的纯度也是关键问题之一。据根生产厂要求,在以三氯氢硅为原料生产多晶硅中,需建立一套对粗料中三氯氢硅含量和精馏后三氯氢硅纯度的分析方法。气相色谱法具有简单、快速的特点,国内外已有许多分析工作者将其用于测定三氯氢硅。但由于三氯氢硅遇水分解,使进样注射器针头堵塞,和热导池热敏元件(钨丝)易被腐蚀损坏,给分析带来了一定的困难。针对以上问题我们加工试制了液体进样 I. Preface As China’s industrial development, the demand for semiconductor components is also growing. In order to continue to improve product quality, improve the purity of raw materials is also one of the key issues. According to the requirements of the root manufacturer, in the production of polycrystalline silicon with trichlorosilane as a raw material, a set of analysis methods for the content of trichlorosilane in the crude material and the purity of trichlorosilane after rectification is established. Gas chromatography with simple, fast features, many analysts at home and abroad have been used to determine trichlorosilane. However, due to trichlorosilane water decomposition, the injection syringe needle plug, and thermal conductivity of the thermal element (tungsten) easily corroded and damaged, to the analysis has brought some difficulties. In response to the above problems we processed a trial of liquid injection