论文部分内容阅读
在线检测硬盘磁头飞行高度(FH)是高密度磁存储技术商品化的重要环节。提出了一种对称共路双频外差干涉测量硬盘磁头飞行高度的方法,用于在线检测磁头飞行高度瞬态调制变化。采用横向塞曼激光器作为外差光源,结合高速相位测量技术,可实现对磁头飞行高度高分辨率(0.1 nm),高采样频率(100 kHz)直接在线溯源测量。通过对称布局的两路差动干涉仪结构,系统能自适应补偿环境振动等扰动引入的随机误差以及盘片复杂运动引入的阿贝误差,还可兼容透射式玻璃盘片模拟条件下的硬盘磁头飞行高度的测量。结果表明,当盘片的偏摆在1.2μm时,系统可清晰描述小于10 nm的飞行高度调制现象。
Online detection of hard disk flying height (FH) is an important part of the commercialization of high-density magnetic storage technology. A symmetrical common-path dual-frequency heterodyne interferometry is proposed to measure the flying height of hard disk heads. The proposed method is used to detect the instantaneous modulation changes of flying head height. The use of a transverse Zeeman laser as the heterodyne light source combined with the high-speed phase measurement technology enables direct on-line traceability of head flying at high resolution (0.1 nm) and high sampling frequency (100 kHz). Through symmetrical layout of two-way differential interferometer structure, the system can adaptively compensate for the random errors introduced by disturbances such as environmental vibration and Abbe errors introduced by the complex movement of the disk, and also compatible with the hard disk heads Measurement of flight altitude. The results show that the system can clearly describe the flight-level modulation less than 10 nm when the deflection of the disk is 1.2 μm.