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超声检测技术与原子力显微技术相结合,构成原子力声显微镜(AFAM),能够实现样品内部纳米结构的测量,并分析如局域弹性模量、刚度等力学性能.本文在传统的原子力显微镜(AFM)的基础上初步构建了AFAM,利用AFM轻敲模式下的微悬臂梁振动激励信号来驱动样品背面的压电超声换能器,并利用轻敲模式控制系统中的锁相环检测经过样品后由探针收集的振动信号,形成振幅及相位图像.这种AFAM方法不需外接信号发生器、锁相放大器及相关控制电路,从而避免AFM内、外部的仪器及控制电路的不同步而引起的AFAM振幅/相位与形貌图像间的偏移.此外,还分析了形貌结构对AFAM振幅图像的影响,为进一步研究AFAM亚表面成像奠定了基础.
Ultrasound and atomic force microscopy combine to form atomic force acoustic microscopy (AFAM), which can measure the nanostructures inside the sample and analyze the mechanical properties such as local elastic modulus and stiffness.In this paper, AFM ) AFAM was constructed based on the AFM tapping mode micro-cantilever vibration excitation signal to drive the piezoelectric ultrasonic transducer on the back of the sample and tapping mode control system using the phase-locked loop detection after the sample The vibration signal collected by the probe to form the amplitude and phase images.This AFAM method without an external signal generator, lock-in amplifier and related control circuits, in order to avoid AFM internal and external instruments and control circuits are not caused by the synchronization AFAM amplitude / phase shift between topography and topography.Furthermore, the influence of topography on AFAM amplitude image was analyzed, which laid the foundation for the further study of AFAM subsurface imaging.