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讨论了研制成功的用于高精度非球面检测的CGH位相自动探测干涉系统。论述了CGH干涉系统的光路和干涉场,采用位相自动探测术有效地降低了随机干扰误差。探讨了采用三波前类剪切干涉法进行绝对测量能有效地消除其系统误差。测试结果表明:该系统检测非球面面形精度达λ/20。若进一步采用绝对测量法进行测量和处理,则其精度约可达λ/50。
Discussed the successful development of high precision aspherical CGH phase detection system automatically interfering. The optical path and interference field of the CGH interferometry system are discussed. The automatic phase detection technique can effectively reduce the random disturbance error. It is discussed that using three-wave front shear interference method for absolute measurement can effectively eliminate systematic errors. The test results show that the system can detect aspherical surface with a precision of λ / 20. If further measurement and processing by absolute measurement method, the accuracy of up to about λ / 50.