【摘 要】
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Raman spectroscopy is a type of inelastic scattering spectroscopy that is widely used in determining and analyzing molecular struc-ture.It also has a number of practical applications in evaluating food safety,medicine,and forensics.The Raman spectral sig-
【机 构】
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School of Precision Instrument and Opto-Electronic Engineering,Tianjin University,Tianjin 300072,Chi
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Raman spectroscopy is a type of inelastic scattering spectroscopy that is widely used in determining and analyzing molecular struc-ture.It also has a number of practical applications in evaluating food safety,medicine,and forensics.The Raman spectral sig-nal is weak,but the development of the surface-enhanced Raman scattering (SERS) technique has overcome this problem and led to further developments in Raman spectroscopy.This paper describes a fundamental study of the use of focused ion beam (FIB)direct writing for preparing gold substrates for SERS.Molecular dynamics and Monte Carlo simulation methods are used to inves-tigate the damage induced by gallium ion implantation of a gold substrate.Based on characterization by x-ray photoelectron spec-troscopy (XPS) and scanning electron microscopy,the mechanism by which ion implantation and annealing influence the dam-age induced by a gallium FIB is analyzed.After annealing at 350 ℃,a mixture of metallic gallium,its oxide Ga2O3 conforming to the stoichiometric ratio,and its sub-stable oxide (Ga2Ox) in sub-stoichiometric ratio precipitated on the surface are detected by XPS.Annealing treatment can effectively reduce the effect of gallium ion implantation on a SERS substrate fabricated by FIB direct writing.
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