研究了Au,In,N i/Au三种不同金属膜与N掺杂p型ZnO的接触特性,发现N i/Au双层膜更适合作为其欧姆电极材料,并比较了不同气氛和不同温度退火对N i/Au电极的影响。发现在O2中退火电极性能发生蜕变,而在N2中退火性能得到改善。指出即使在N2中退火,退火温度的选择也是至关重要的,本实验在400℃,氮气气氛下退火150 s,得到了较好的欧姆接触特性。 The contact properties of Au, In and Ni / Au films with N-doped p-type ZnO were studied. It was found that N i / Au bilayer films were more suitable as the ohmic electrode materials. The effects of different atmospheres and temperatures Effect of Annealing on N i / Au Electrode. It was found that the properties of annealing electrode in O2 evolved, while the annealing performance in N2 was improved. It is pointed out that the choice of annealing temperature is of crucial importance even after annealing in N2. In this experiment, annealing at 400 ℃ for 150 s in a nitrogen atmosphere gives better ohmic contact characteristics.