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采用单点金刚石切削的方法加工了KDP晶体,利用回归分析的方法建立了表面粗糙度预测模型,达到了在加工前设计、预测和控制表面粗糙度的目的。利用预测模型分析了进给量、切削速度、背吃刀量对表面粗糙度的影响。通过优化设计获得了KDP晶体在该条件下的最佳切削参数,得到的表面粗糙度的最佳估计值为6.3389nm。利用最佳的切削工艺参数,加工出了表面粗糙度值为6.895nm的超光滑表面。
The single-point diamond cutting method was used to fabricate KDP crystal. The regression model was used to establish the surface roughness prediction model, and the purpose of designing, predicting and controlling the surface roughness was achieved before processing. The influence of feed rate, cutting speed and back-eating amount on the surface roughness was analyzed by using the prediction model. The optimal cutting parameters of KDP crystal under this condition were obtained through optimization design. The best estimate of the surface roughness obtained was 6.3389 nm. Using the best cutting parameters, the ultra-smooth surface with a surface roughness of 6.895 nm has been machined.