一、引言二次离子质谱(SIMS)是一种灵敏度很高的表面化学成份分析方法。而要想将这种方法用作定量分析,就必须首先知道各种二次离子的绝对产率。Plog等人对15种金属的氧化表面,将它们的二次离子碎片MeO_n~±(n=0,1,2…)的绝对产率S~±对碎片价K作图(K=q+2n,q为碎片离子所带的正、负电荷数,这里等于±1;n为碎片离子中的氧原子数),对 I. Introduction Secondary ion mass spectrometry (SIMS) is a highly sensitive surface chemical composition analysis method. To use this method for quantitative analysis, you must first know the absolute yield of various secondary ions. Plog et al. Plotted the absolute yield S ± of their secondary ion fragments MeO_n ± (n = 0, 1, 2 ...) against the fragment valences K for the oxidized surfaces of 15 metals (K = q + 2n , q is the number of positive and negative charges carried by the fragment ions, where is equal to ± 1; n is the number of oxygen atoms in the fragment ions)