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随着激光加工在现代工业中得到广泛应用,对激光加工产品的质量要求越来越高。而激光束焦点位置的波动直接影响所加工产品的质量,因此对引起焦点波动的因素研究对控制产品质量有重要意义。通过对公式和实验数据的分析,得出影响激光束焦点位置波动的主要有透镜—工件距离的变化、光腔输出镜和聚焦镜的热变形及飞行光路中的不同光程3方面因素。
With the laser processing in the modern industry has been widely used, the quality of the laser processing products are getting higher and higher. The focus of the laser beam fluctuations directly affect the quality of the processed products, so the factors that cause the focus of fluctuations in the quality control of products of great significance. Through the analysis of the formulas and experimental data, the main lens-workpiece distance variations that affect the focus position of the laser beam, the thermal deformation of the cavity output mirror and the focusing mirror, and the different optical path lengths in the flight path are obtained.