论述了对微型齿轮、微型涡轮和微型悬臂梁等微型机械零件的研制．介绍了通过计算机辅助设计，利用ＩＣ的微细加工技术，采用射频溅射和光刻技术制造微型机械零件的方法 The development of micro mechanical parts such as micro-gear, micro-turbine and micro-cantilever is discussed. This paper introduces a method of manufacturing micro mechanical parts by radio frequency sputtering and lithography through computer aided design, micro fabrication using IC