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本文回顾了溅射法制备CZTS的若干历史文献,并主要就元素比例、溅射顺序、靶材选择、基片温度四个方面的经验做了总结。
This paper reviews some historical documents about the preparation of CZTS by sputtering and summarizes the experience of the four aspects of element ratio, sputtering order, target selection and substrate temperature.