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近二十年来,电极尺寸相当于或小于微米级的微电极技术已有了长足的发展,并显示了有别于常规电极的优越性能。以迅速发展着的微电子技术制作的微电极也为微型化学传感器和生物传感器的批量制作及商品化展现了引人注目的前景。以厚膜和薄膜技术制作的微电极已在微型传感器领域中得到了相当成功的应用,某些微型气体传感器和生物传感器已实现商品化。近年来,基于硅片各相异性三维刻蚀的微机械加工技术也已用于微型传感器的制作。作者在长期从事电流型化学与生物传感器研究工作的基础上,自90年代初起即依托中科院上海冶金所国家传感技术重点实验室,开展了以开发适合于批量制作的微型化学及生物传感器为目标的合作研究项目。与此同时,也对微电极的电化学特性及生物活性分子的表面修饰技术进行了较深入的探索。本文将对作者所在的联合课题组多年来的研究工作作
In the past 20 years, the microelectrode technology with electrode size equal to or smaller than the micron size has been greatly developed, and shows the superior performance compared with the conventional electrode. Microelectrodes made with the rapidly evolving microelectronics technology also present compelling prospects for the mass production and commercialization of miniature chemical sensors and biosensors. Microelectrodes made with thick-film and thin-film technologies have been quite successful in the field of micro-sensors, and some micro-gas sensors and biosensors have been commercialized. In recent years, micromachining techniques based on the anisotropic three-dimensional etching of silicon have also been used for the fabrication of micro-sensors. On the basis of long-term research work on current-type chemistry and biosensors, the author has relied on the State Key Laboratory of Sensor Technology, Shanghai Institute of Metallurgy, Chinese Academy of Sciences since the early 1990s to develop micro-chemical and biosensors suitable for mass production as The goal of the joint research project. At the same time, the electrochemical properties of microelectrodes and surface modification of bioactive molecules have also been explored in more depth. This article will be the author’s joint task force for many years of research work