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提出一种不用标样确定基体薄涂层厚度并同时得到薄膜成分的新方法，通过理论计算，得出在不同涂层厚度下，涂层与基体的特征Ｘ射线相对强度比Ｉｃ／Ｉｓ，并作出理论曲线。然后用能谱技术测出Ｉｃ／Ｉｓ，可由理论曲线得出相应的涂层厚度，经实验证明该方法可行。用能谱技术确
A new method of determining the thickness of the thin coating and the thin film composition at the same time without a standard sample is proposed. The theoretical X-ray relative intensity ratio Ic / Is of the coating and the substrate at different coating thicknesses Make a theoretical curve. Then Ic / Is can be measured by EDS, and the corresponding coating thickness can be obtained from the theoretical curve. The experiment proved that the method is feasible. Using spectrum technology indeed