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采用准分子激光扫描消融法淀积YB32C23O7-δ高温超导薄膜，利用常规光刻工艺制备线列高温超导薄膜器件，采用离子束刻蚀制备与高温超导薄膜器件匹配的熔凝石英微透镜阵列，测试了微透镜／高温超导薄膜器件所构成的混合结构在1～5μm红外波段的几项重要的光响应特性．
YB32C23O7-δ high temperature superconducting thin films were deposited by excimer laser scanning ablation method, and the high temperature superconducting thin film devices were fabricated by conventional photolithography. The fused quartz microlenses matched with high temperature superconducting thin film devices were prepared by ion beam etching Array, several important photoresponse characteristics of the hybrid structure consisting of microlens / high temperature superconducting thin film devices in the infrared band of 1 ~ 5μm were tested.