利用改进的solgel工艺,通过快速热退火和慢速退火两种方式在Si衬底上制备了PbTiO3多晶薄膜,并采用红外反射光谱对PbTiO3薄膜进行了研究,观察到了薄膜中所有红外活性的8个声子模,发现两种退火方式得到的薄膜的光谱存在差异:前者的声子模频率除了三个变化不明显外,其余都低于后者.认为影响声子模行为的主导因素是薄膜中存在的应力,其中软模对应力的影响最为敏感 PbTiO3 polycrystalline thin films were prepared on Si substrate by rapid thermal annealing and slow annealing using improved solgel process. The PbTiO3 thin films were studied by infrared reflectance spectroscopy. All the infrared active 8 A phonon mode, found that there are differences between the spectra obtained by the two annealing methods: the phonon mode frequency of the former except the three changes is not obvious, the rest are lower than the latter that the dominant factor affecting phonon mode behavior is the film In the presence of stress, in which soft-mode the most sensitive to the impact of stress