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$lP 工程光学的发展趋势—………………………………………………………………………………·世内顺平(二) X射线——极紫外光学中的超精密加工及其应用………………………………………………… 难波义治(7) BEPC同步辐射软X射线光刻光束线的总体设计特性—………………………
$ LP engineering optics trends - ...................................................................................... · world smooth (two) X-ray - Ultra-precision processing in extreme ultraviolet optics and its applications ................................................................................................................... Namba (7) General design of BEPC synchrotron soft X-ray lithography beamline characteristic-………………………