论文部分内容阅读
三、二次离子质谱和离子探针分析二次离子质谱和离子探针分析是近20年发展起来的一种固体表面微区分析技术。由于它能以10~(-13)～10~(-19)克的绝对检出限和10~(-6)～10~(-9)的相对检出限检测微小区域内的微量成分,能以优于1微米的横向分辨率、优于5～10纳米的深度分辨率提供所有元素在X、Y、Z 三维空间的分布情况,能够定量测定各种元素在微区范围内的同位素丰度比,因而获得了广泛的应用。1.基本原理在真空中,当用能量为几到几十千电子伏特的一次离子束轰击固体试样表面时,少
Third, secondary ion mass spectrometry and ion probe analysis Secondary ion mass spectrometry and ion probe analysis is developed in recent 20 years, a solid surface micro-area analysis. Because it can detect the trace components in the tiny area with the absolute detection limit of 10 ~ (-13) ~ 10 ~ (-19) g and the relative detection limit of 10 ~ (-6) ~ 10 ~ (-9) Allows the distribution of all elements in the three-dimensional space X, Y, and Z with lateral resolution better than 1 μm and depth resolution better than 5 to 10 nm, enabling the quantitative determination of isotopic abundance of various elements in the micro-range Degree ratio, which has been widely used. 1. Fundamentals In a vacuum, when using a primary ion beam with energies of a few to tens of thousands of electron volts to bombard the solid specimen surface,