论文部分内容阅读
介绍了专门应用于超精密车床在线检测加工表面微观形貌的检测系统。一种新式高分辨率同轴式激光轮廓仪与超精密车床的有机结合 ,突破了传统的必须卸下工件才能对其进行检测的限制 ,实现了加工与检测的一体化 ,达到了检测真正服务于加工的目的。介绍了激光轮廓仪的原理、结构以及检测系统的工作原理。实验结果表明 ,在利用超精密车床精密气浮导轨作为激光轮廓仪工作台的条件下 ,测量车削加工表面微观形貌时 ,在高度方向上的分辨率按国际惯用的均方值表示已优于 0 .1 nm。
The detection system specially applied to the on-line inspection and processing of the micro-topography of ultra-precision lathe is introduced. A new high-resolution coaxial laser profiler with ultra-precision lathe organic combination of breaking the traditional must be removed to detect the workpiece limit, to achieve the integration of processing and testing, to achieve the detection of real service For processing purposes. The principle, structure and operating principle of the laser profiler are introduced. The experimental results show that the resolution in the height direction is better than the internationally accepted mean square value when using the ultra precision lathe precision air guide rail as the laser profiler table to measure the micro morphology of the turning surface. 0 .1 nm.