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本文提出一种新型隐埋Ｓｉ／ＳｉＯ２Ｂｒａｇｇ反射器结构的Ｓｉ基共振腔型光电探测器，该结构具有与集成电路相兼容的特点．理论计算表明量子效率较普通光电探测器提高了３～４倍．
In this paper, a novel Si-based resonant cavity photodetector with buried Si / SiO2Bragg reflector structure is proposed, which has the characteristics of being compatible with integrated circuits. Theoretical calculations show that the quantum efficiency than normal photodetector increased by 3 to 4 times.