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本文阐述了利用离子薄化技术制取透射电子显微镜用薄膜试样的一般程序和选择薄化参数时应注意的几个问题。並介绍了在制备某些脆硬材料样品和粉末颗粒薄膜样品时所取得的效果。
This article describes the general procedure for preparing thin film samples for transmission electron microscopy using ion-thinning techniques and several issues to be aware of when selecting thinning parameters. The results obtained in the preparation of some samples of brittle material and powder particles were also presented.