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本文论述了扫描力显微镜中的点衍射干涉现象，论证了硅微探针可以作为后向点衍射板并用于检测微探针变位的光学原理。根据这一原理设计了一种新型灵巧的扫描力显微镜，它具有更好的抗干扰能力，稳定优质的光电信号。理论分析及实测表明，该扫描力显微镜具有０．０１ｎｍ的纵向分辨率、５ｎｍ左右的横向分辨率。
This paper discusses the point diffraction interference phenomenon in the scanning force microscopy and demonstrates the optical principle that the silicon microprobe can be used as a back-point diffraction plate and used to detect the displacement of the microprobe. According to this principle, a new smart scanning force microscope has been designed, which has better anti-interference ability and stable high-quality optical signals. Theoretical analysis and measurement show that the scanning force microscope has a vertical resolution of 0.01nm and a horizontal resolution of about 5nm.