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利用低功率飞秒激光振荡器进行材料表面加工的研究并将其应用于微光学元件的加工制作领域;对飞秒激光倍频光以及飞秒激光与光刻胶材料相互作用进行了实验;以光刻胶作为牺牲层进行表面加工获得了各种玻璃光栅及光掩模板;利用光学显微镜和原子力显微镜(AFM)对实验结果进行检测,得到微米量级的特征线宽;所得光栅的光学性能通过He-Ne激光器进行检测,实验结果与理论值一致。该研究为微光学元件的加工制作提供了新的方法。
The research on material surface processing using low power femtosecond laser oscillator and its application in the fabrication of micro-optical components; the experiment on the interaction between femtosecond laser double-frequency light and femtosecond laser and photoresist material; Photoresist surface treatment as a sacrificial layer to obtain a variety of glass grating and photomask; using optical microscopy and atomic force microscopy (AFM) experimental results were detected to obtain the characteristic line width on the order of microns; the optical properties of the resulting grating through He-Ne laser test, the experimental results consistent with the theoretical value. The research provides a new method for the fabrication of micro-optical components.