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本文介绍了一套能准确诊断真空电弧等离子体参数的Ｌａｎｇｍｕｉｒ探针系统。测得典型参数：电子温度０．６－０．７ｅＶ，等离子体电位２Ｖ，电子浓度２×１０￣（１５）／ｍ￣３。该装置可用于自动监控成膜过程。
This article presents a set of Langmuir probe systems that accurately diagnose vacuum arc plasma parameters. Measured typical parameters: electron temperature 0.6-0.7eV, plasma potential 2V, electron concentration 2 × 10 ~ (15) / m ~ 3. The device can be used to automatically monitor the filming process.