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目前激光微型加工主要用于微电子学、微型机械加工、微光学领域,本文对它在这几方面的应用情况及其他方面的前景作一介绍。1 微电子学在微电子学中,激光工艺广泛用于以下几类工序:●激光光刻、集成电路修复、编码和微标志等;●激光微调电子元件:电阻、石英谐振腔、滤波器
At present, laser micromachining is mainly used in the fields of microelectronics, micromachining and micro-optics. This article introduces its application in these aspects and other prospects. 1 Microelectronics In microelectronics, the laser process is widely used in the following types of processes: ● Laser lithography, integrated circuit repair, coding and micro-markings; ● Laser trimming electronic components: resistors, quartz resonators, filters