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带传压管和容腔的压力传感器的动态数学模型在理论上是分布参数模型,需用管道流体动力学来建立。本文对这种压力传感器不建立分布参数模型,而建立集中参数的差分方程模型、离散传递函数模型和连续传递函数模型。动态补偿的实验结果是好的,因此认为这种压力传感器的集中参数模型是实用的。 本文还对无传压管和容腔的压力传感器,如Kistler公司的压电式压力传感器和Entran公司的压阻式压力传感器,建立了动态数学模型。文中还给出了单位阶跃响应和频率响应两种非参数模型,以及时间域和频率域的动态性能指标。
The dynamic mathematical model of the pressure sensor with pressure pipe and cavity is theoretically a distributed parameter model and needs to be established by pipeline fluid dynamics. In this paper, the pressure sensor does not establish a distributed parameter model, and the establishment of a centralized parameter difference equation model, discrete transfer function model and continuous transfer function model. The experimental results of dynamic compensation are good, therefore, it is considered that the centralized parameter model of this pressure sensor is practical. This paper also established a dynamic mathematical model for pressure sensors without pressure transfer tube and cavity, such as Kistler’s piezoelectric pressure sensor and Entran’s piezoresistive pressure sensor. The paper also gives two non-parametric models of step response and frequency response, as well as dynamic performance indicators in time domain and frequency domain.